Lời giải:
Áp dụng BĐT Bunhiacopxky ta có:
\(\left(\frac{1}{16x^2}+\frac{1}{4y^2}+\frac{1}{z^2}\right)(x^2+y^2+z^2)\geq \left(\frac{1}{4}+\frac{1}{2}+1\right)^2\)
\(\Leftrightarrow M.1\geq \frac{49}{16}\Leftrightarrow M\geq \frac{49}{16}\)
Vậy \(M_{\min}=\frac{49}{16}\)
Dấu "=" xảy ra khi \((x,y,z)=(\sqrt{\frac{1}{7}}; \sqrt{\frac{2}{7}}; \sqrt{\frac{4}{7}})\)