\(M=\frac{1}{a^2+b^2+c^2}+\frac{a+b+c}{abc}=\frac{1}{a^2+b^2+c^2}+\frac{1}{ab}+\frac{1}{ac}+\frac{1}{bc}\)
\(M\ge\frac{1}{a^2+b^2+c^2}+\frac{9}{ab+ac+bc}=\frac{1}{a^2+b^2+c^2}+\frac{4}{2\left(ab+ac+bc\right)}+\frac{7}{ab+ac+bc}\)
\(M\ge\frac{\left(1+2\right)^2}{a^2+b^2+c^2+2\left(ab+ac+bc\right)}+\frac{7}{\frac{\left(a+b+c\right)^2}{3}}=\frac{9}{\left(a+b+c\right)^2}+\frac{21}{\left(a+b+c\right)^2}=30\)
\(\Rightarrow M_{min}=30\) khi \(a=b=c=\frac{1}{3}\)