\(M=\dfrac{1}{16}\left(\dfrac{1}{x^2}+\dfrac{4}{y^2}+\dfrac{16}{z^2}\right)\ge\dfrac{1}{16}.\dfrac{\left(1+2+4\right)^2}{\left(x^2+y^2+z^2\right)}=\dfrac{49}{16}\)
\(\Rightarrow M_{min}=\dfrac{49}{16}\) khi \(\left\{{}\begin{matrix}x^2=\dfrac{1}{7}\\y^2=\dfrac{2}{7}\\z^2=\dfrac{4}{7}\end{matrix}\right.\)